鈍化膜測試部分標准

• SEMI F60 Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components
• SEMI F72 Test Method for Auger Electron Spectroscopy(AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components
• HB 5059- 1977 電化學抛光質量檢驗
• HB 5292-1984 不鏽鋼酸洗鈍化質量檢驗